Automatic testing of the digital micromirror device/sup TM/ (DMD/sup TM/)

Author

Skaggs, F. ; Arakawa, H. ; Doane, D. ; Dudasco, D. ; Streckmann, G.

Author_Institution

Texas Instrum. Inc., Dallas, TX, USA

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

11

Lastpage

12

Abstract

The DMD is basically a special static RAM (SRAM) of a CMOS design capped with a multilevel metal process to produce the digital micromirror light modulating superstructure. Consequently, to properly test the DMD requires dc current, CMOS SRAM memory, plus specialized electro-optical testing. Texas Instruments has maintained a rigorous test development activity during its DMD development and preproduction phase that has resulted in the ability to automatically characterize a wide range of DMD devices, including defect states, contrast ratios, and mirror array reflection efficiencies.

Keywords

CMOS memory circuits; SRAM chips; automatic testing; electro-optical modulation; integrated circuit testing; integrated optoelectronics; mirrors; optical testing; ATE optical test subsystem; CMOS SRAM memory; Texas Instruments; automatic testing; contrast ratios; dc current; defect states; digital micromirror device; digital micromirror light modulating superstructure; electro-optical testing; mirror array reflection efficiencies; multilevel metal process; static RAM; Automatic testing; CMOS process; Digital modulation; Instruments; Micromirrors; Mirrors; Optical modulation; Phased arrays; Random access memory; Read-write memory;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540772

Filename

540772