Automatic testing of the digital micromirror device/sup TM/ (DMD/sup TM/)

The DMD is basically a special static RAM (SRAM) of a CMOS design capped with a multilevel metal process to produce the digital micromirror light modulating superstructure. Consequently, to properly test the DMD requires dc current, CMOS SRAM memory, plus specialized electro-optical testing. Texas Instruments has maintained a rigorous test development activity during its DMD development and preproduction phase that has resulted in the ability to automatically characterize a wide range of DMD devices, including defect states, contrast ratios, and mirror array reflection efficiencies.