Si micromachined 2D optical scanning mirror and its application to scanning sensors

We have developed a two dimensional micro optical scanner integrated with a photodiode and piezoresistors in order to miniaturize scanning type optical sensors for barcode readers or laser radar. The scanner with a size of 7 mm/spl times/7 mm is fabricated by silicon bulk-micromachining and is capable of 2D optical scanning, photodetection and scanning position detection. A miniature 3D vision sensor for a pipe inspection mobile machine has also been developed utilizing the scanner and a spiral scanning detection method. This paper describes the structure, operation principle and characteristics of the developed scanner and 3D sensor.