Title :
Si micromachined 2D optical scanning mirror and its application to scanning sensors
Author_Institution :
Central R&D Lab., OMRON Corp., Ibaraki, Japan
Abstract :
We have developed a two dimensional micro optical scanner integrated with a photodiode and piezoresistors in order to miniaturize scanning type optical sensors for barcode readers or laser radar. The scanner with a size of 7 mm/spl times/7 mm is fabricated by silicon bulk-micromachining and is capable of 2D optical scanning, photodetection and scanning position detection. A miniature 3D vision sensor for a pipe inspection mobile machine has also been developed utilizing the scanner and a spiral scanning detection method. This paper describes the structure, operation principle and characteristics of the developed scanner and 3D sensor.
Keywords :
elemental semiconductors; image sensors; integrated optoelectronics; micromachining; micromechanical resonators; microsensors; mirrors; optical fabrication; optical scanners; optical sensors; position measurement; silicon; 2D optical scanning; 7 mm; Si; Si bulk-micromachining; Si micromachined 2D optical scanning mirror; barcode readers; laser radar; miniature 3D vision sensor; photodetection; photodiode integration; piezoresistor integration; pipe inspection mobile machine; scanning position detection; scanning type optical sensors; spiral scanning detection method; two dimensional micro optical scanner; Inspection; Integrated optics; Laser radar; Mirrors; Optical sensors; Photodiodes; Piezoresistive devices; Radar detection; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540775
