Title :
Silicon etalon arrays for IR transform spectroscopy
Author :
Fenner, D.B. ; Carangelo, R.M. ; Kung, P.-J. ; Hamblen, D.G. ; Budnick, J.I.
Author_Institution :
AFR Inc., East Hartford, CT, USA
Abstract :
A model, simulations, and fabrication concepts are presented for a spectrometer-on-a-chip : an array of micromachined stepped-thickness, low-finesse, silicon etalon plates, optically coupled to an IR detector array.
Keywords :
Fourier transform spectroscopy; arrays; infrared spectroscopy; light interferometers; micromachining; silicon; IR transform spectroscopy; Si; fabrication; micromachining; model; silicon etalon array; simulation; spectrometer-on-a-chip; Bandwidth; Infrared detectors; Infrared spectra; Optical arrays; Optical device fabrication; Optical interferometry; Optical refraction; Sensor arrays; Silicon; Spectroscopy;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540778
