Title :
Compound-cavity micro-interferometer using VCSEL and piezoelectric actuator
Author :
Ito, Minora ; Yamamoto, Eiji ; Hashimoto, Shuji ; Komazaki, I. ; Miyajima, Hiroki ; Shinohara, Shoko
Author_Institution :
Olympus Opt. Co. Ltd., Tokyo, Japan
Abstract :
A novel compound-cavity interferometer which measures displacement without ambiguity is studied. A vertical-cavity surface-emitting laser (VCSEL) has several advantages in comparison with a conventional edge-emitting laser for sensing use. The authors have proposed an optical sensor using a VCSEL and it has realized very small size without optical parts such as a collimator lens. The new sensor we proposed in this paper is based on a combination of a micro optical interferometer using a VCSEL and a piezoelectric actuator. In this study, two signal waves which have /spl pi//2 radian phase difference are obtained in order to enable detection of the displacement direction.
Keywords :
displacement measurement; light interferometers; microactuators; piezoelectric actuators; surface emitting lasers; VCSEL; compound-cavity micro-interferometer; displacement measurement; optical sensor; piezoelectric actuator; vertical-cavity surface-emitting laser; Displacement measurement; Lenses; Optical collimators; Optical interferometry; Optical sensors; Optical surface waves; Phase detection; Piezoelectric actuators; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:
Conference_Location :
Keystone, CO, USA
Print_ISBN :
0-7803-3175-3
DOI :
10.1109/LEOSST.1996.540791
