Title :
Dynamic Design of High Speed Precision Positioning System
Author :
Zhao, Xingyu ; Wu, Yimin ; Zhang, Dawei
Author_Institution :
Tianjin Univ., Tianjin
Abstract :
Facing IC packaging, a high speed precision positioning x-y table with new elastic decoupling mechanism is developed based on the voice coil actuator (VCA) direct driving. The small moving mass makes it possible that the positioning table moves at high speed and precision. The decoupling theory is expatiated. By use of the FEA and dynamic simulation method, the dynamic characteristics of the high speed table are studied. Based on the dynamic response of rigid and elastic body, the spring as the key component in the decoupling mechanism is investigated. The influence of the flexibility of hinge to the spring stiffness and preload is discussed in detail, and the influence of the spring stiffness and preload to the positioning table is also given. At last, the matching law of the spring stiffness and preload is presented. The achieved results would be helpful to the dynamic design of the kind of manufacturing equipment. All design parameters achieved and the design theory also proved its correctness in the precision experiment.
Keywords :
control system synthesis; finite element analysis; integrated circuit manufacture; integrated circuit packaging; position control; IC packaging; decoupling theory; dynamic design; dynamic response; elastic body; elastic decoupling mechanism; finite element analysis; high speed precision positioning system; manufacturing equipment; positioning table; rigid body; spring stiffness; voice coil actuator direct driving; Acceleration; Actuators; Bonding; Coils; Fasteners; High speed integrated circuits; Integrated circuit packaging; Joining processes; Springs; Vibrations; dynamic simulation and design; elastic components; positioning table; spring;
Conference_Titel :
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-0828-3
Electronic_ISBN :
978-1-4244-0828-3
DOI :
10.1109/ICMA.2007.4303689