A virtual prototype manufacturing software system for MEMS

Summary form only given, as follows. IntelliSense reports on a new computer-aided design software system for rapid prototype development of microelectromechanical systems. This system, called IntelliCAD/sup TM/, is self-contained, easy-to-use and has an open architecture. IntelliCAD´s integration is accomplished by an architecture different from a previously reported academic system. The new architecture integrates mask layout, a material database, a fabrication database, process simulation, forward and backward search at each fabrication step, process debugging, solid modeling, and parametric electrostatic, thermomechanical and electromechanical analysis into one efficient and user friendly system. The novelty of our approach is in linking the performance modeling to the manufacturing (machine) parameters and allowing modifications for user applications.