Title :
Evaluation of Scale Dependent of Fast Fracture Strength of Micro Component
Author :
Okazaki, Toshikazu ; Nakamura, Shunsuke ; Hirata, Hideyuki ; Mihara, Yutaka ; Yoshimura, Hidenori
Author_Institution :
Kagawa Univ., Takamatsu
Abstract :
In order to design the MEMS having good reliability, it is necessary to know the mechanical properties such as strength, fracture toughness and fatigue strength of micro components. In this paper, the fatigue testing machine was made. The examination of the fast fracture strength against the several kinds of specimens which dimensions were different each other was carried out. And volume dependency of the strength was discussed.
Keywords :
fatigue testing; fracture toughness; micromechanical devices; MEMS; fast fracture strength; fatigue strength; fatigue testing machine; fracture toughness; micro component; volume dependency; Actuators; Design engineering; Fatigue; Force control; Mechanical factors; Mechanical systems; Micromechanical devices; Reliability engineering; Silicon; Testing; Actuator Design; Elements; Mechanisms; Micro and Nano Systems; Modeling; Novel Actuator Systems; Simulation Techniques and Methodologies; Structures;
Conference_Titel :
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-0828-3
Electronic_ISBN :
978-1-4244-0828-3
DOI :
10.1109/ICMA.2007.4303701
