A micro-opto-mechanical switch integrated on silicon for optical fiber network

Author

Ollier, Eric ; Labeye, Pierre ; Revol, Frédéric

Author_Institution

LETI, Grenoble, France

fYear

1996

fDate

5-9 Aug. 1996

Firstpage

71

Lastpage

72

Abstract

Due to the increasing complexity of optical networks, low speed, polarisation and wavelength insensitive fiber compatible optical switches become more and more interesting, especially for network safety and network reconfiguration. We propose an integrated opto-mechanical switch by combining two mass-production technologies: integrated optics on silicon and silicon micromachining. The feasibility of this switch is demonstrated with performances not far from the telecommunication specifications.

Keywords

electro-optical deflectors; electro-optical switches; elemental semiconductors; integrated optics; integrated optoelectronics; micromachining; micromechanical devices; optical fabrication; optical fibre networks; silicon; Si; fiber compatible optical switches; integrated optics; integrated opto-mechanical switch; low speed; mass-production technology; micro-opto-mechanical switch; network reconfiguration; network safety; optical fiber network; silicon micromachining; telecommunication specifications; Etching; Optical device fabrication; Optical fiber networks; Optical fiber polarization; Optical losses; Optical switches; Optical waveguides; Silicon compounds; Structural beams; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Conference_Location

Keystone, CO, USA

Print_ISBN

0-7803-3175-3

Type

conf

DOI

10.1109/LEOSST.1996.540799

Filename

540799