Analysis of sigma-delta micro-mechanical accelerometer´s parameters

Author

Bingjun, Lv ; Pengfei, Wang ; Zhi, Li ; Xiaowei, Liu ; Yuntao, Liu

Author_Institution

MEMS Center, Harbin Inst. of Technol., Harbin, China

fYear

2011

fDate

12-16 Oct. 2011

Firstpage

267

Lastpage

271

Abstract

Based on conventional 2nd-order and 4th-order closed-loop sigma-delta accelerometer (ΣΔ accelerometer) system models, an investigation into parameters that influence accelerometer´s performance is presented, including lead compensation coefficient, mechanical resonant frequency and input signal. Moreover, effect of compensation coefficient under high Q is researched. The simulation results imply that an accelerometer system has an optimal compensation coefficient and its performance is inversely proportional to resonant frequency. And the system is conditionally stable under different input acceleration. By optimizing these parameters, a 4th-order sigma-delta accelerometer with 93dB SNDR can be achieved.

Keywords

accelerometers; closed loop systems; sigma-delta modulation; ΣΔ accelerometer system models; closed-loop sigma-delta accelerometer; mechanical resonant frequency; sigma-delta micro-mechanical accelerometer; Accelerometers; Lead; Noise; Q factor; Resonant frequency; Sensors; Sigma delta modulation; Compensation coefficient; Input signal; Micro-accelerometer; Resonant frequency; Sigma-delta;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronics and Microelectronics Technology (AISOMT), 2011 Academic International Symposium on

Conference_Location

Harbin

Print_ISBN

978-1-4577-0794-0

Type

conf

DOI

10.1109/AISMOT.2011.6159370

Filename

6159370