Design, Control and Application of a PZT-driven Micro-stage

A precision positioning micro-stage driven by the piezoelectric actuator (PZT) is designed in this paper. The mathematic model of the micro-stage is modeled. Based on the theoretical calculation and the finite element analysis by ANSYS, the micro-stage is designed, which has the advantages of high precision, fast frequency response and high structural compaction. In order to overcome the inherent hysteresis and creep of PZT, a fuzzy PI controller is established. At last, experiments are carried out. Experimental results show that the micro-stage system has good performance. Compared with regular PID controller, the fuzzy PI controller has better time and frequency tracking characteristics, and higher positioning accuracy. Applied the micro-stage to compensate the yaw error of the macro-stage, the linear motion accuracy of the macro-stage improved greatly.