Adaptive Sliding Mode Control with Bound Estimation for MEMS Angular Rate Sensor

This paper presents a sliding mode adaptive controller for MEMS z-axis gyroscope, an adaptive model reference state tracking controller which can real-time estimate the angular velocity vector, and the damping and stiffness model coefficients is proposed. The adaptive law to estimate the unknown upper bound of the parameter uncertainties and external disturbance is developed. The numerical simulation for MEMS gyroscope model is investigated to verify the effectiveness of the proposed adaptive sliding mode control scheme. It is shown that the proposed adaptive sliding mode control scheme offers several advantages such as on-line estimation the angular rate, upper bound of disturbance, and large robustness to parameter variations and external disturbance.