New fabrication technology of convex and concave microlens using UV curing method

Author

Park, Eun-Hyun ; Kim, Moon-Jung ; Kwon, Young-Se

Author_Institution

Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea

Volume

2

fYear

1999

fDate

1999

Firstpage

639

Abstract

We developed new fabrication technology of convex and concave microlens using UV curing method. The merits of this technology are: (1) high quality microlenses are fabricated by very simple process; (2) microlens radius is easily controlled by varying pedestal size and quantity of injected liquid material; (3) the distance between lens and substrate can be controlled by pedestal height; (4) various shaped microlenses can be formed on same substrate. We believe that this fabrication technology of microlens has wide application as parts for optical system and optical devices

Keywords

integrated optics; microlenses; optical arrays; optical fabrication; UV curing method; concave microlens; convex microlens; fabrication technology; high quality microlens fabrication; injected liquid material; microlens radius; optical devices; optical system; pedestal height; pedestal size; substrate; Curing; Fabrication; Lenses; Microoptics; Optical devices; Optical fibers; Optical interconnections; Optical materials; Scanning electron microscopy; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting

Conference_Location

San Francisco, CA

ISSN

1092-8081

Print_ISBN

0-7803-5634-9

Type

conf

DOI

10.1109/LEOS.1999.811890

Filename

811890