Oxidised porous silicon waveguide technology for silicon optoelectronics

Author

Balucani, M. ; Bondarenko, V. ; Fazio, E. ; Lamedica, G. ; Ricciardelli, A. ; Viarengo, E. ; Ferrari, A. ; Bulthuis, H.F. ; van der Vliet, F.M. ; Broquin, J.E. ; Vitrant, G.

Author_Institution

Dipt. di Ingegneria Elettronica, Rome Univ., Italy

Volume

2

fYear

1999

fDate

1999

Firstpage

643

Abstract

The work presented, that is a part of the ongoing European project OLSI no. 28934, overcomes problems by an OPSWG (oxidized porous silicon waveguide). In order to provide confinement and propagation of light within the waveguide (WG), the guiding region (core) has to have a higher refractive index than the surrounding cladding regions. Such construction of a WG can be provided by a variation of anodization regimes during the PS (porous silicon) formation. The technological process of the OPSWG fabrication consists of three main steps: (a) anodization of Si through the openings in a mask to form PS; (b) thermal oxidation of PS; (c) high temperature densification of OPS

Keywords

ULSI; anodisation; densification; integrated optics; integrated optoelectronics; optical fabrication; optical waveguides; oxidation; silicon; European project OLSI; OPSWG fabrication; Si; anodization regimes; cladding regions; guiding region; high temperature densification; higher refractive index; mask; optical waveguide light propagation; oxidised porous silicon waveguide technology; oxidized porous silicon waveguide; porous silicon; silicon optoelectronics; thermal oxidation; Electron optics; High speed optical techniques; Integrated circuit interconnections; Integrated circuit technology; Optical attenuators; Optical waveguides; Shape; Silicon; Telephony; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting

Conference_Location

San Francisco, CA

ISSN

1092-8081

Print_ISBN

0-7803-5634-9

Type

conf

DOI

10.1109/LEOS.1999.811892

Filename

811892