Title :
Integrated optical waveguide components fabricated by LIGA technique
Author :
Paatzsch, Thomas ; Bauer, Hans-Dieter ; Gaudron, Anne ; Jobst, Britta ; Stadler, Stefan ; Popp, Martin ; Smaglinski, Ingo ; Ehrfeld, Wolfgang
Author_Institution :
Inst. fur Mikrotech. Mainz GmbH, Germany
Abstract :
The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes
Keywords :
LIGA; integrated optics; optical communication equipment; optical couplers; optical fabrication; optical waveguide components; LIGA technique; cost-effective fabrication; good optical performance; high-end computer backplanes; highly parallel datacom applications; integrated optical waveguide components fabrication; polymer waveguide components; precision engineering methods; reproducible fabrication technique; stable; star coupler; Application software; Concurrent computing; Integrated optics; Optical device fabrication; Optical devices; Optical polymers; Optical waveguide components; Optical waveguides; Precision engineering; Production;
Conference_Titel :
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5634-9
DOI :
10.1109/LEOS.1999.811893
