Title :
A DC-to-32 GHz 2-bit MEMS phase shifter
Author :
Lou, Jianzhong ; Zhao, Zhengping ; Ruixia, Yang ; Lu, Miao ; Hu, Xiaodong
Author_Institution :
Hebei Univ. of Technol., Tianjin, China
Abstract :
Microwave and millimeter-wave phase shifters are essential components in radar systems, wireless and satellite broadband communication networks. RF MEMS technology provides a possibility solution for this. A 2-bit DC-to-32 GHz DMTL phase shifter was prepared on high-resistivity silicon substrate in this paper, and a novel "ground-actuation" configuration is proposed for the first time to reduce the actuation voltage.
Keywords :
micromechanical devices; microwave phase shifters; millimetre wave phase shifters; silicon; substrates; 0 to 32 GHz; DMTL phase shifter; MEMS phase shifter; RF MEMS technology; actuation voltage; ground-actuation configuration; high-resistivity silicon substrate; microwave phase shifters; millimeter-wave phase shifters; Artificial satellites; Broadband communication; Communication networks; Micromechanical devices; Millimeter wave communication; Millimeter wave radar; Millimeter wave technology; Phase shifters; Radiofrequency microelectromechanical systems; Spaceborne radar;
Conference_Titel :
Antennas and Propagation Society International Symposium, 2004. IEEE
Print_ISBN :
0-7803-8302-8
DOI :
10.1109/APS.2004.1331975
