Opt-Electro-Mechanical Modeling of an Electro-Thermally Actuated Analog Micromirror

This paper develops a complete opt-electro-thermo-mechanical analytical model for an three-layer electro-thermally actuated micromirror, which relates the tilting angle of the micromirror with its driving voltage, the film thickness, the applied load at the tip and relevant parameters of material physical properties. The relative error between analytical model experimental results is less than 20%.