Filtered vacuum-arc plasma source for composite coatings deposition

Design and principle of operation of the new two-cathode filtered vacuum arc plasma source are described. Results of probe measurements of ion components of the output plasma stream depending on magnitude and distribution geometry of magnetic fields in plasma guiding channels of the source are presented. The system effectiveness ratio of the device makes up ~2.5%. The possibility of control of the ion current density distribution diagram is shown. Nonuniformity of component concentration distribution of the coating at use of the cathodes from aluminum and titanium is about plusmn6.5%.