DocumentCode :
3407428
Title :
Mechanical clip-on and flip-chip assembly on silicon submount for self aligned fiber to waveguide coupling
Author :
Porte, Henri ; Armbruster, Vincent ; Kaou, Neila ; de Labachelerie, Michel ; Mollier, P. ; Devoldere, Nicole
Author_Institution :
Lab. d´´Opt. P.M. Duffieux, Univ. de Franche-Comte, Besancon, France
Volume :
2
fYear :
1999
fDate :
1999
Firstpage :
864
Abstract :
Flip chip bonding by use of solder bumps has been widely developed to hybridize active devices such as lasers, detectors, and amplifiers, onto silicon microbenches. We report here a new method allowing hybridization of any kind of substrate onto a silicon submount with a passive and high precision self alignment process, the substrate being held in three dimensions, allowing coupling of waveguides to multiple fibers. Moreover the system allows a detachable configuration and avoids any additional micromachining of the waveguide substrate. Alignment of the waveguide axis with the V-grooves axis was obtained with an accuracy better than 2 μm. Preliminary results indicate that the excess loss during the self-alignment and coupling of a fiber by insertion in a V-groove compared to an active alignment was typically of -3 dB
Keywords :
flip-chip devices; integrated optics; optical fabrication; optical fibre couplers; optical losses; optical waveguides; Si; detachable configuration; excess loss; flip chip bonding; flip-chip assembly; multiple fibers; passive high precision self alignment process; self aligned fiber to waveguide coupling; silicon microbenches; silicon submount; solder bumps; substrate hybridization; waveguide axis alignment; Apertures; Assembly; Biomembranes; Etching; High speed optical techniques; Microstructure; Optical device fabrication; Optical waveguides; Silicon compounds; Waveguide components;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location :
San Francisco, CA
ISSN :
1092-8081
Print_ISBN :
0-7803-5634-9
Type :
conf
DOI :
10.1109/LEOS.1999.812008
Filename :
812008
Link To Document :
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