A square-plate piezoelectric linear motor operating in two orthogonal and isomorphic face-diagonal-bending modes

Author

Penghong Ci ; Zhijiang Chen ; Guoxi Liu ; Shuxiang Dong

Author_Institution

Mater. Sci. & Eng. Dept., Peking Univ., Beijing, China

Volume

61

Issue

1

fYear

2014

fDate

Jan-14

Firstpage

159

Lastpage

165

Abstract

We report a piezoelectric linear motor made of a single Pb(Zr,Ti)O₃ square-plate, which operates in two orthogonal and isomorphic face-diagonal-bending modes to produce precision linear motion. A 15 × 15 × 2 mm prototype was fabricated, and the motor generated a driving force of up to 1.8 N and a speed of 170 mm/s under an applied voltage of 100 V_pp at the resonance frequency of 136.5 kHz. The motor shows such advantages as large driving force under relatively low driving voltage, simple structure, and stable motion because of its isomorphic face-diagonal-bending mode.

Keywords

lead compounds; linear motors; prototypes; ultrasonic motors; Pb(ZrTi)O₃; driving force; driving voltage; isomorphic face diagonal bending mode; orthogonal face diagonal bending mode; precision linear motion; prototype; resonance frequency; square plate piezoelectric linear motor; Actuators; Force; Frequency measurement; Friction; Impedance; Resonant frequency; Vibrations;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2014.6689783

Filename

6689783