A square-plate piezoelectric linear motor operating in two orthogonal and isomorphic face-diagonal-bending modes

We report a piezoelectric linear motor made of a single Pb(Zr,Ti)O₃ square-plate, which operates in two orthogonal and isomorphic face-diagonal-bending modes to produce precision linear motion. A 15 × 15 × 2 mm prototype was fabricated, and the motor generated a driving force of up to 1.8 N and a speed of 170 mm/s under an applied voltage of 100 V_pp at the resonance frequency of 136.5 kHz. The motor shows such advantages as large driving force under relatively low driving voltage, simple structure, and stable motion because of its isomorphic face-diagonal-bending mode.