DocumentCode :
3408438
Title :
Power electronics topologies for plasma generators
Author :
Millner, Alan R.
Author_Institution :
MKS Instrum., Andover, MA
fYear :
2008
fDate :
June 30 2008-July 2 2008
Firstpage :
359
Lastpage :
362
Abstract :
The nature of the industrial plasma load requires power electronics topologies with high switching frequencies and tailored output impedance. Depending on the method of coupling to the plasma, the power circuit topology should be selected to provide these characteristics as an inherent property of the circuit. Two design examples of practical interest are given, one for a magnetically coupled toroidal plasma generator and one for a RF generator modulator. This design approach allows the choice of circuit topology to provide load stabilization at the switching frequency, without need for broad band feedback loops and their noise and stabilization problems. This paper describes the specific design of each converter, and presents experimental results supporting the selection of these topologies. These experimental results are measured on full scale units designed for industrial use as products. Results include circuit diagrams, simulations, experimental voltage waveforms, and performance results on plasma loads.
Keywords :
electric generators; network topology; power electronics; RF generator modulator; broad band feedback loops; industrial plasma load; load stabilization; magnetically coupled toroidal plasma generator; power circuit topology; power electronics topologies; Circuit topology; Coupling circuits; Electronics industry; Plasma applications; Plasma measurements; Plasma properties; Plasma simulation; Power electronics; Power generation; Switching frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Electronics, 2008. ISIE 2008. IEEE International Symposium on
Conference_Location :
Cambridge
Print_ISBN :
978-1-4244-1665-3
Electronic_ISBN :
978-1-4244-1666-0
Type :
conf
DOI :
10.1109/ISIE.2008.4676925
Filename :
4676925
Link To Document :
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