Title :
Gas release from a compact powdery sample ion source
Author :
Wada, Motoi ; Kasuya, Toshiro ; Sasao, Mamiko ; Kawano, Hiroyuki
Author_Institution :
Dept. of Electron., Doshisha Univ., Kyoto, Japan
Abstract :
The species and the quantities of gases released during the operation of a compact powdery sample ion source were investigated. During the initial heating of the filament, H2O was emitted from the powder and its partial pressure occupied more than 90% of the total pressure. Neither LiH nor LiN3, emitted detectable amount of Li. Atomic and molecular nitrogens were found emitted during the operation with LiN3, and the rate of N2 emission due to electron stimulated decomposition was compared with the extracted ion beam. Gas efficiencies for positive and negative ions were estimated to be the order of 10-4 and 10-3, respectively. The gas release rate from the ion source can be reduced below 2×10-6 Pa-m3/s for 1 mA of electron current by heating the powder prior to the source operation
Keywords :
electron stimulated desorption; ion sources; negative ions; positive ions; H2O; LiH; LiN3; N2; N2 emission rate; atomic nitrogens; compact powdery sample ion source; electron current; electron stimulated decomposition; extracted ion beam; gas efficiencies; gas release; ion implantation; molecular nitrogens; negative ions; partial pressure; positive ions; source operation; total pressure; Containers; Electrodes; Electron emission; Electron guns; Flanges; Heating; Ion beams; Ion sources; Lenses; Powders;
Conference_Titel :
Ion Implantation Technology Proceedings, 1998 International Conference on
Conference_Location :
Kyoto
Print_ISBN :
0-7803-4538-X
DOI :
10.1109/IIT.1999.812121