Title :
SHF-range surface acoustic wave interdigital transducers using electron beam exposure
Author :
Yamanouchi, K. ; Cho, Y. ; Meguro, T.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
Nanometer electrodes of 0.085-μm width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an I2-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filters experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained
Keywords :
surface acoustic wave devices; ultrasonic transducers; 11 GHz; 5 GHz; 85 nm; I2-plasma cleaning; SAW; SHF-range surface acoustic wave interdigital transducers; electron beam exposure; transducers; ultrasonic; Acoustic transducers; Acoustic waves; Cleaning; Electrodes; Electron beams; Frequency; Insertion loss; Lithography; SAW filters; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.1988.49352
