Temperature calibration of CMOS magnetic vector probe for contactless angle measurement system

Author

Schneider, M. ; Haberli, A. ; Metz, M. ; Malcovati, P. ; Baltes, H.

Author_Institution

Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland

fYear

1996

fDate

8-11 Dec. 1996

Firstpage

533

Lastpage

536

Abstract

This paper reports on the offset behavior of an integrated CMOS magnetotransistor vector probe. For the first time, measurement results on the temperature dependence of the offset and on its time stability are presented. They encourage the realization of a temperature calibrated angle measurement system. This system consists of a two dimensional magnetic sensor integrated with circuitry on a single chip in combination with a small permanent magnet. It exhibits 1/spl deg/ resolution and 3/spl deg/ accuracy.

Keywords

CMOS integrated circuits; angular measurement; calibration; circuit stability; magnetic sensors; mixed analogue-digital integrated circuits; probes; signal processing equipment; CMOS magnetic vector probe; contactless angle measurement system; galvanomagnetic effects; integrated CMOS magnetotransistor vector probe; offset behavior; single chip integration; small permanent magnet; temperature calibration; temperature dependence; time stability; two dimensional magnetic sensor; Calibration; Circuit stability; Goniometers; Integrated circuit measurements; Probes; Semiconductor device measurement; Temperature dependence; Temperature measurement; Temperature sensors; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1996. IEDM '96., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Print_ISBN

0-7803-3393-4

Type

conf

DOI

10.1109/IEDM.1996.554037

Filename

554037