DocumentCode :
3410948
Title :
Large Air-gap Magnetic Levitation of Electrodeposited Co-Ni-Mn-P Films
Author :
Elbuken, Caglar ; Khamesee, Mir Behrad ; Yavuz, Mustafa
Author_Institution :
Waterloo Univ., Waterloo
fYear :
2007
fDate :
5-8 Aug. 2007
Firstpage :
3272
Lastpage :
3277
Abstract :
In this paper, a magnetic levitation system for large air-gap microlevitation is presented. The levitation of silicon samples coated with Co-Ni-Mn-P magnetic film is demonstrated. The magnetic layer was electrodeposited at room temperature with a MEMS compatible process. The magnetic properties of the Co-based films are determined and the required magnetic field is calculated. The levitation setup is designed to generate the required field in an air-gap of 200 mm. The experimental results show the 1-D levitation of 19 mg electrodeposited samples in a constant and step-wise motion. It is observed that levitating objects spin around themselves due to the shape of the magnetic field generated. A modification to the levitation system is proposed to cope with the spinning problem that will further improve the levitation performance of the system.
Keywords :
cobalt; electrodeposition; magnetic levitation; magnetic thin films; manganese; manipulators; micromechanical devices; nickel; phosphorus; MEMS; air-gap magnetic levitation; electrodeposited films; magnetic film; micromanipulation; robotics; Air gaps; Magnetic fields; Magnetic films; Magnetic levitation; Magnetic properties; Micromechanical devices; Shape; Silicon; Spinning; Temperature; MEMS; Magnetic levitation; electrodeposition; micromanipulation; robotics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location :
Harbin
Print_ISBN :
978-1-4244-0828-3
Electronic_ISBN :
978-1-4244-0828-3
Type :
conf
DOI :
10.1109/ICMA.2007.4304086
Filename :
4304086
Link To Document :
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