Title :
Resonant magnetic field microsensors in standard CMOS technology
Author :
Baglio, Salvatore ; Latorre, Laurent ; Nouet, Pascal
Author_Institution :
Catania Univ., Italy
Abstract :
In this paper micromachined sensors for the estimation of magnetic field are presented. These devices have been realized through a MEMS technology based on a standard CMOS process coupled with an IC compatible post-processing phase. Different mechanical structures have been realized and studied. In particular the resonant working mode of the system has been taken into account. Particular attention has been devoted to the characterization of the interfering input effects Suitable models have been defined to allow meaningful numerical simulation of the electro-mechanical device
Keywords :
CMOS integrated circuits; digital simulation; identification; magnetic field measurement; micromachining; microsensors; IC compatible postprocessing; MEMS technology; electro-mechanical device; estimation of magnetic field; mechanical structures; micromachined sensors; numerical simulation; resonant magnetic field microsensors; resonant working mode; standard CMOS process; standard CMOS technology; CMOS integrated circuits; CMOS process; CMOS technology; Magnetic fields; Magnetic resonance; Magnetic sensors; Mechanical sensors; Micromechanical devices; Microsensors; Semiconductor device modeling;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1999. IMTC/99. Proceedings of the 16th IEEE
Conference_Location :
Venice
Print_ISBN :
0-7803-5276-9
DOI :
10.1109/IMTC.1999.776793
