DocumentCode
3411400
Title
ISAF 2002. Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics (Cat. No.02CH37341)
fYear
2002
fDate
1-1 June 2002
Keywords
ferroelectric devices; ferroelectric materials; ferroelectric thin films; micromechanical devices; MEMS applications; characterization techniques; ferroelectrics; fundamental properties; modeling; thin film materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on
Conference_Location
Nara, Japan
ISSN
1099-4734
Print_ISBN
0-7803-7414-2
Type
conf
DOI
10.1109/ISAF.2002.1195855
Filename
1195855
Link To Document