Smart force sensors for scanning force microscope using the micromachined piezoelectric PZT cantilevers

Author

Chengkuo Lee ; Itoh, T. ; Maeda, R. ; Suga, T.

fYear

1996

fDate

8-11 Dec. 1996

Firstpage

545

Lastpage

548

Abstract

The fabrication, characteristics, and applications of a smart PZT force sensor and its sensor array for the scanning force microscopes are interpreted in this paper. This force sensor is a cantilever shape, with the dimension like 125-160/spl times/50/spl times/4 /spl mu/m, and is able to simultaneously execute the self-excited force sensing and z-directional actuating. Clear images and parallel images can be obtained by the SFM operated in air and in liquid with a single cantilever, and by the multiprobe SFM using a cantilever array, respectively.

Keywords

atomic force microscopy; force measurement; intelligent sensors; lead compounds; micromachining; microsensors; piezoceramics; piezoelectric transducers; PZT; PbZrO3TiO3; micromachined piezoelectric PZT cantilever; multiprobe SFM; parallel image; scanning force microscope; self-excited force sensing; sensor array; smart force sensor; z-directional actuating; Fabrication; Force sensors; Intelligent sensors; Mechanical sensors; Microscopy; Optical recording; Sensor arrays; Sensor phenomena and characterization; Shape; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1996. IEDM '96., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Print_ISBN

0-7803-3393-4

Type

conf

DOI

10.1109/IEDM.1996.554042

Filename

554042