DocumentCode :
3411900
Title :
Thickness-dependent leakage current of (PVDF/PbTiO3) pyroelectric bilayer thin film detectors
Author :
Kao, M.C. ; Wang, C.M. ; Chen, Y.C.
Author_Institution :
Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
fYear :
2002
fDate :
28 May-1 June 2002
Firstpage :
119
Lastpage :
122
Abstract :
The novel pyroelectric infrared (IR) detectors have been fabricated using the Polyvinylidene Fluoride (PVDF)/Lead Titanate (PT) pyroelectric bilayer thin films which were deposited onto Pt(111)/SiO2/Si(100) substrates by a sol-gel process. The ceramic/polymer structure was constructed of the randomly oriented polycrystalline PT film(∼1 μm) heated at 700°C for 1 h and the β-phase PVDF film crystallized at 65°C for 2 h. The effects of PVDF thin film thickness (100∼580 nm) on the pyroelectric response of IR detectors were studied. The results show that the depositions of PVDF thin films onto the PT films will cause the leakage current (J) of the detectors decrease from 6.37 × 10-7 A/cm2 to 3.86 × 10-7 A/cm2. The specific detectivity (D*) measured at 100 Hz decreased from 2.72 × 10-7 cm·Hz12//W for detector without PVDF to 1.71 × 10-7 cm·Hz12//W for detector with PVDF thickness of 580 nm. By optimizing the ratio of the specific detectivity (D*) to leakage current, D*/J, the detector with PVDF thickness of 295 nm exhibits the best performance.
Keywords :
ferroelectric thin films; infrared detectors; lead compounds; leakage currents; polymer films; pyroelectric detectors; 295 nm; PbTiO3; SEM micrograph; ceramic/polymer structure; frequency dependence; maximum voltage responsivity; pyroelectric bilayer thin film detectors; pyroelectric infrared detectors; pyroelectric response; randomly oriented polycrystalline film; sol-gel process; thickness-dependent leakage current; Ceramics; Infrared detectors; Lead; Leak detection; Leakage current; Polymer films; Pyroelectricity; Sputtering; Substrates; Titanium compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on
ISSN :
1099-4734
Print_ISBN :
0-7803-7414-2
Type :
conf
DOI :
10.1109/ISAF.2002.1195885
Filename :
1195885
Link To Document :
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