DocumentCode :
3411982
Title :
Electrostatic properties of molecular gated BioFETs
Author :
Shaked, M. ; Shaya, O. ; Doron, A. ; Cohen, A. ; Levy, I. ; Rosenwaks, Y.
Author_Institution :
Dept. of Phys. Electron., Tel-Aviv Univ., Ramat-Aviv
fYear :
2008
fDate :
June 30 2008-July 2 2008
Firstpage :
2056
Lastpage :
2059
Abstract :
We combine Kelvin probe force microscopy and current-voltage measurements in order to characterize silicon-oninsulator biological field effect transistors. The measurements were conducted on monolayer of (3-aminopropyl)-trimethoxysilane, which was deposited on a plasma activated silicon oxide surface of the transistor channel. The work function of the modified silicon oxide decreased by more then 2 eV as a function of the chemical treatment time. The current-voltage measurements preformed on the same devices showed a very large decrease (~10 V) in the threshold voltage of the transistors following the chemical modification. A consequent increase of almost 3 orders of magnitude in the drain-source current was also observed. The (3-aminopropyl)-trimethoxysilane induced charge redistribution effects on the transistor channel surface are analyzed and discussed.
Keywords :
electrostatics; field effect transistors; silicon-on-insulator; Kelvin probe force microscopy; current-voltage measurements; drain-source current; electrostatic properties; induced charge redistribution; molecular gated BioFET; silicon-on-insulator biological field effect transistors; Chemicals; Current measurement; Electrostatic measurements; FETs; Force measurement; Kelvin; Microscopy; Plasma measurements; Probes; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Electronics, 2008. ISIE 2008. IEEE International Symposium on
Conference_Location :
Cambridge
Print_ISBN :
978-1-4244-1665-3
Electronic_ISBN :
978-1-4244-1666-0
Type :
conf
DOI :
10.1109/ISIE.2008.4677125
Filename :
4677125
Link To Document :
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