High resolution tomographic acoustic microscopy

The scanning tomographic acoustic microscope (STAM) is an instrument capable of performing subsurface imaging of microscopic specimens. Designed around the scanning laser acoustic microscope (SLAM) the STAM incorporates numerous hardware and software modifications which allow automated imaging of the acoustic profile of 3-D specimens at high resolution. With these modifications the STAM is shown to be capable of accurate imaging for nondestructive evaluation of microscopic specimens. This paper describes the design and operation of the STAM hardware, and the algorithms developed to permit high resolution imaging. Examples are provided of multiple angle and multiple frequency tomographic reconstructions.