The applications of micro- nanofabrication technologies in T/R modules

Transmit receive modules as the key part of active phased array antennas are focused on how to reduce the volume, weight, and improve the performance in high frequency. Micro- nanofabrication technologies can play a strategic role in improving the performance, functionality, and reducing the mass of transmit receive modules for active phased array antennas. This paper reports recent results on the micro- nanofabrication technologies such as thin film microwave circuits and nano optical elements. The thin film microwave circuits which are applied in transmit receive modules that have 50 μm line width and high density ground vias have been fabricated. The nano optical elements which are applied in optical detector that have finest width of 100 nm and aspect ratio of 7 and 13 have also been fabricated.