Title :
Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip
Author :
Romani, Aldo ; Manaresi, N. ; Medoro, G. ; Leonardi, Ariovaldo ; Tartagni, Marco ; Guerrieri, Roberto
Author_Institution :
Bologna Univ., Italy
Abstract :
Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35μm 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is ≤1.6mV, the resolution of the 12b ADC.
Keywords :
CMOS integrated circuits; biosensors; capacitive sensors; electrochemical sensors; electrophoresis; CMOS lab-on-a-chip; bioparticles localization; capacitive sensor array; cells detection; dielectrophoresis; fully-electronic detection; micro-site circuit; microbeads; particle actuation; particle-associated equivalent input capacitance variations; poly capacitors; Actuators; Biosensors; Capacitance; Capacitive sensors; Circuits; Electrodes; Lab-on-a-chip; Pulse amplifiers; Sensor arrays; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International
Print_ISBN :
0-7803-8267-6
DOI :
10.1109/ISSCC.2004.1332675
