Title :
Temperature characteristics for surface acoustic wave in annealed proton-exchanged LiNbO3 waveguides
Author :
Cheng, Chien-Chuan ; Kao, Kuo-Sheng ; Chen, Ying-Chung
Author_Institution :
Dept. of Electron. Eng., De Lin Inst. of Technol. & Commerce, Taipei, Taiwan
fDate :
28 May-1 June 2002
Abstract :
The temperature characteristics for surface acoustic wave (SAW) in annealed proton-exchanged (APE) LiNbO3 waveguides were investigated. The process performed by immersing z-cut LiNbO3 substrates in pure octanoic acid was experimentally studied. The penetration depth of hydrogen assumed to be equal to the waveguide depth (d) was measured by secondary-ion mass spectrometry (SIMS). The annealing process was carried out in a horizontal furnace kept at 400°C for 4 h under a dry O2 gas flow. The velocity (Vp) and temperature coefficient of frequency (TCF) of SAW measured by a network analyzer were observed. The results showed that the Vp and TCF in APE LiNbO3 samples tended to improve in comparison with the PE LiNbO3 samples. It exhibited that the annealing effect could result in a restoration of the decreased Vp and an improvement of TCF. However, the values of TCF in APE LiNbO3 samples were larger than that of the unexchanged one.
Keywords :
acoustic wave velocity; annealing; dielectric waveguides; hydrogen; ion exchange; lithium compounds; piezoelectric materials; secondary ion mass spectra; sorption; surface acoustic wave waveguides; surface acoustic waves; 4 h; 400 degC; H penetration depth; LiNbO3; annealed proton-exchanged LiNbO3 waveguides; pure octanoic acid; secondary-ion mass spectrometry; surface acoustic wave velocity; temperature characteristics; temperature coefficient of frequency; waveguide depth; Acoustic waveguides; Acoustic waves; Annealing; Fluid flow; Frequency; Furnaces; Hydrogen; Mass spectroscopy; Surface acoustic waves; Temperature;
Conference_Titel :
Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on
Print_ISBN :
0-7803-7414-2
DOI :
10.1109/ISAF.2002.1195954
