Electromechanical characterization of thick PT and PZT films

Author

Simon, L. ; Gonnard, P. ; Lebrun, L.

Author_Institution

Lab. de Genie Electrique et Ferroelectricite, NSA, Villeurbanne, France

fYear

2002

fDate

28 May-1 June 2002

Firstpage

459

Lastpage

462

Abstract

This work is focused on the electromechanical characterization of lead titanate and Pb(Zr_0.52Ti_0.48)O₃ thick films (30 - 100 μm) screen-printed on various substrates (alumina, silicon and glass-ceramic). Measurements of permittivity and piezoelectric constant are given at low signal and as a function of the AC electric field amplitude. Measurement of the true remanent polarization on PT films is more delicate due to the existence of an internal electric field which is different according to the type of the bottom electrode. A correct value can be achieved by extrapolation. At last the elastic stiffness and the extensional thickness coupling factor k_t are evaluated by analyzing the resonance frequency spectrum of the piezoelectric film supported by a substrate. Some reasons of inaccuracy of the results are stated.

Keywords

dielectric hysteresis; dielectric polarisation; lead compounds; permittivity; piezoelectric materials; thick films; AC electric field amplitude; MEMS; PZT; PbTiO₃; PbZrO3TiO3; elastic stiffness; electromechanical characterization; extensional thickness coupling factor; hysteresis loops; permittivity; piezoelectric constant; resonance frequency spectrum; screen-printed films; thick films; true remanent polarization; Electric fields; Electric variables measurement; Lead; Permittivity measurement; Piezoelectric films; Piezoelectric polarization; Silicon; Substrates; Thick films; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on

ISSN

1099-4734

Print_ISBN

0-7803-7414-2

Type

conf

DOI

10.1109/ISAF.2002.1195967

Filename

1195967