A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity

Author

Zhou, Jia ; Li, Po ; Zhang, Song ; Zhou, Feng ; Huang, Yiping ; Yang, Pengyuan ; Minhang, Bao

Author_Institution

ASIC & Syst. State Key Lab, Fudan Univ., Shanghai, China

fYear

2002

fDate

28 May-1 June 2002

Firstpage

471

Lastpage

474

Abstract

A, novel MEMS gas sensor including a PZT thin film layer and a zeolite layer is developed in this paper, which shows effective combination of high sensitivity and high selectivity. Working in resonating mode, the sensor depicts the mass loading due to molecular adsorption of the zeolite by the frequency shift. The relationship between the frequency shift in percent and the concentration of Freon is linear. The minimum mass loading of 3.5 × 10^-9 and the sensitivity of -0.0024%/ppm can be determined from the experimental results.

Keywords

adsorption; gas sensors; lead compounds; micromachining; micromechanical resonators; microsensors; piezoelectric thin films; zeolites; Freon concentration; MEMS gas sensor; PZT; PbZrO3TiO3; elastic beam model; frequency shift; high selectivity; high sensitivity; mass loading; microporous zeolite; molecular adsorption; piezoelectric microcantilever; piezoelectric thin film layer; resonating mode; sol-gel formed layer; zeolite layer; Application specific integrated circuits; Chemical sensors; Chemical technology; Equations; Gas detectors; Mechanical sensors; Micromechanical devices; Resonant frequency; Structural beams; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on

ISSN

1099-4734

Print_ISBN

0-7803-7414-2

Type

conf

DOI

10.1109/ISAF.2002.1195970

Filename

1195970