DocumentCode
3413688
Title
Session 17 Overview: MEMS and Sensors
Author
Ayazi, Farrokh ; Akinwande, Akintunde Ibitayo
Author_Institution
Georgia Institute of Technology
fYear
2004
fDate
15-19 Feb. 2004
Firstpage
308
Lastpage
309
Abstract
Start of the above-titled section of the conference proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International
Conference_Location
San Francisco, CA
ISSN
0193-6530
Print_ISBN
0-7803-8267-6
Type
conf
DOI
10.1109/ISSCC.2004.1332717
Filename
1332717
Link To Document