Title :
A 2.5V 14-bit ΣΔ CMOS-SOI capacitive accelerometer
Author :
Amini, B.V. ; Pourkamali, Siavash ; Ayazi, Farrokh
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper presents a 2.5V 14b fully-differential ΣΔ interface IC in 0.25μm CMOS based on a programmable front-backend architecture for a high-resolution SOI capacitive accelerometer. Capacitive resolution is 22aF at 75Hz (RBW = 1 Hz), equivalent to 110μg with a dynamic range of 85dB and sensitivity of 0.5V/g. The chip occupies 2mm2 and consumes 6mW.
Keywords :
CMOS analogue integrated circuits; accelerometers; capacitive sensors; differential amplifiers; microsensors; operational amplifiers; sigma-delta modulation; silicon-on-insulator; 2.5 V; 6 mW; CMOS-SOI capacitive accelerometer; MEMS accelerometers; differential operational-transconductance amplifier; folded-cascode architecture; fully-differential sigma-delta interface IC; high precision accelerometers; high-resolution capacitive accelerometer; on-chip sampling clock; programmable front-backend architecture; voltage-controlled relaxation oscillator; 1f noise; Accelerometers; Clocks; Differential amplifiers; Integrated circuit noise; Micromechanical devices; Noise reduction; Operational amplifiers; Sampling methods; Voltage-controlled oscillators;
Conference_Titel :
Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International
Print_ISBN :
0-7803-8267-6
DOI :
10.1109/ISSCC.2004.1332720
