A 2.5V 14-bit ΣΔ CMOS-SOI capacitive accelerometer

Author

Amini, B.V. ; Pourkamali, Siavash ; Ayazi, Farrokh

Author_Institution

Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2004

fDate

15-19 Feb. 2004

Firstpage

314

Abstract

This paper presents a 2.5V 14b fully-differential ΣΔ interface IC in 0.25μm CMOS based on a programmable front-backend architecture for a high-resolution SOI capacitive accelerometer. Capacitive resolution is 22aF at 75Hz (RBW = 1 Hz), equivalent to 110μg with a dynamic range of 85dB and sensitivity of 0.5V/g. The chip occupies 2mm² and consumes 6mW.

Keywords

CMOS analogue integrated circuits; accelerometers; capacitive sensors; differential amplifiers; microsensors; operational amplifiers; sigma-delta modulation; silicon-on-insulator; 2.5 V; 6 mW; CMOS-SOI capacitive accelerometer; MEMS accelerometers; differential operational-transconductance amplifier; folded-cascode architecture; fully-differential sigma-delta interface IC; high precision accelerometers; high-resolution capacitive accelerometer; on-chip sampling clock; programmable front-backend architecture; voltage-controlled relaxation oscillator; 1f noise; Accelerometers; Clocks; Differential amplifiers; Integrated circuit noise; Micromechanical devices; Noise reduction; Operational amplifiers; Sampling methods; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International

ISSN

0193-6530

Print_ISBN

0-7803-8267-6

Type

conf

DOI

10.1109/ISSCC.2004.1332720

Filename

1332720