Title :
A fourth-order ΣΔ interface for micromachined inertial sensors
Author :
Petkov, V.P. ; Boser, Bernhard E.
Author_Institution :
California Univ., Berkeley, CA, USA
Abstract :
A high-order electromechanical ΣΔ modulator uses additional electronic filtering in the loop to eliminate excessive in-band quantization noise inherently present in second-order implementations. The interface is fabricated in a 0.5μm CMOS process and tested with a gyroscope and accelerometer achieving 1°/s/4Hz and 150μg/Hz of resolution, respectively. Active chip area is 0.9mm2 and the IC consumes a total of 18mW.
Keywords :
CMOS integrated circuits; accelerometers; band-pass filters; gyroscopes; microsensors; quantisation (signal); sigma-delta modulation; transfer functions; 18 mW; CMOS process; accelerometer; additional electronic filtering; fourth-order sigma-delta interface; gyroscope; high-order electromechanical modulator; in-band quantization noise; low-pass response; micromachined inertial sensors; second-order transfer function; Circuit noise; Filtering; Filters; Gyroscopes; Noise level; Noise shaping; Quantization; Sampling methods; Signal resolution; Signal to noise ratio;
Conference_Titel :
Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International
Print_ISBN :
0-7803-8267-6
DOI :
10.1109/ISSCC.2004.1332723
