• DocumentCode
    3414718
  • Title

    A study of acoustoelectric effect in GaAs by fabricating interdigital transducer using electron beam lithography technique

  • Author

    Abedin, M.N. ; Han, K.J. ; Das, P.

  • Author_Institution
    Rensselaer, Polytech. Inst., Troy, NY, USA
  • fYear
    1988
  • fDate
    2-5 Oct 1988
  • Firstpage
    229
  • Abstract
    Transverse acoustoelectric voltage (TAV) of Te-doped GaAs and n-GaAs/SI GaAs samples with photon energy and bias voltage is demonstrated. GaAs electronic properties were investigated using a surface acoustic wave (SAW) technique. The TAV was monitored across the GaAs sample by fabricating the interdigital transducer directly on the GaAs surface using electron beam lithography. In the processing, to protect the surface from contamination, the metal lift-off technique is also used. The TAV is developed due to the nonlinear interaction between the electric field accompanying SAW, and the free carriers near the GaAs surface. The TAV spectra are obtained to determining the bandgap energy and the Te-level which is observed at 300 K. It is also noticed that the TAV amplitude changes with bias voltage under the room illumination. However, when the illumination is turned off, the TAV does not change with bias voltage
  • Keywords
    III-V semiconductors; acoustoelectric effects; acoustoelectric transducers; electron beam lithography; gallium arsenide; surface acoustic wave devices; surface acoustic waves; GaAs; GaAs:Te; acoustoelectric; bandgap energy; bias voltage; electron beam lithography; interdigital transducer; metal lift-off; room illumination; surface acoustic wave; Acoustic transducers; Acoustic waves; Acoustoelectric effects; Electron beams; Gallium arsenide; Lighting; Monitoring; Surface acoustic waves; Surface contamination; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
  • Conference_Location
    Chicago, IL
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1988.49373
  • Filename
    49373