Title :
Corrugated quantum well infrared photodetectors
Author :
Chen, C.J. ; Choi, K.K. ; Tsui, D.C.
Author_Institution :
Dept. of Electr. Eng., Princeton Univ., NJ, USA
Abstract :
We introduce here a novel light coupling scheme for quantum well infrared photodetectors (QWIPs). The new device structure utilizing this coupling scheme, referred to as the corrugated QWIP (C-QWIP), couples normal incident light effectively even for detector size as small as 50/spl times/50 /spl mu/m/sup 2/ and shows little spectrum narrowing effect, indicating that it can be applied to the manufacturing of high resolution focal plane arrays and is a viable candidate for multi-color or broadband infrared detection.
Keywords :
infrared detectors; optical couplers; photodetectors; semiconductor quantum wells; broadband detection; corrugated quantum well infrared photodetector; focal plane array; light coupling; multi-color detection; spectrum narrowing; Diffraction gratings; Electromagnetic wave absorption; Etching; Infrared detectors; Optical coupling; Optical sensors; Photodetectors; Polyimides; Sensor arrays; Wires;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.554070
