Title :
Measurement of permittivity by microwave with heating of a thin film by identical cavity
Author :
Kanai, Yu ; Nikawa, Yoshio
Author_Institution :
Graduate Sch. of Eng., Kokushikan Univ., Tokyo, Japan
Abstract :
In measuring complex permittivity for a thin material in microwave frequency, to apply a cylindrical cavity is one of the best ways. Also, by using the cavity it becomes possible to measure temperature dependency of the complex permittivity of material. In this paper, TE011 cylindrical cavity at 2.45GHz is developed. This cavity allows high microwave power input and it enables to measure permittivity with heating characteristics. In the development, electromagnetic field simulator is used also for the suitable design.
Keywords :
cavity resonators; microwave materials; microwave measurement; permittivity measurement; thin films; 2.45 GHz; cylindrical cavity; electromagnetic field simulator; permittivity measurement; temperature dependency measurement; thin film heating; Electromagnetic heating; Electromagnetic measurements; Frequency measurement; Microwave frequencies; Microwave measurements; Permittivity measurement; Tellurium; Temperature dependence; Temperature measurement; Transistors;
Conference_Titel :
Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings
Print_ISBN :
0-7803-9433-X
DOI :
10.1109/APMC.2005.1606998
