A large-scale SPC implementation using the IBM multimedia SPC program

Author

Harrison, Mark ; Shapiro, Russ

Author_Institution

IBM Technol. Products, Essex Junction, VT, USA

fYear

1992

fDate

30 Sep-1 Oct 1992

Firstpage

153

Lastpage

158

Abstract

The implementation of statistical process control (SPC) in the chemical vapor deposition (CVD) process area of a semiconductor wafer fabricator is described. Advanced self-study interactive video/computer training and a series of cross-functional meetings were used for problem solving. The training that production employees received enabled them to enhance their basic statistical knowledge and skills, while cross-functional group meetings served as the vehicle for bringing that knowledge and experience together in the manufacturing environment to establish SPC online controls

Keywords

chemical vapour deposition; computer based training; interactive video; multimedia systems; semiconductor technology; statistical process control; IBM multimedia SPC program; chemical vapor deposition; cross-functional meetings; large-scale SPC implementation; manufacturing environment; problem solving; production employees; self-study interactive video/computer training; semiconductor wafer fabricator; statistical process control; Computer graphics; Computerized monitoring; Control charts; Large-scale systems; Manufacturing; Mice; Personnel; Problem-solving; Process control; Production;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992

Conference_Location

Cambridge, MA

Print_ISBN

0-7803-0740-2

Type

conf

DOI

10.1109/ASMC.1992.253778

Filename

253778