Title :
Advanced CIM environment for manufacturing data analysis
Author :
Miller, William H., Jr. ; Pool, Mark W.
Author_Institution :
Harris Corp., Melbourne, FL, USA
fDate :
30 Sep-1 Oct 1992
Abstract :
An environment for performing complex analyses of semiconductor manufacturing processes and IC products is described. This innovative analysis toolset has increased the productivity of product engineering, process engineering and design organizations by providing a method for complex manufacturing data reduction without the need for exhaustive training. The interactive, forms-based interface utility has also provided significant reductions in the time required to isolate parameters and identify relationships that significantly influence manufacturing yields. The foundation of the system is the internally developed, Unix-based Manufacturing and Engineering Data Base (MEDB). MEDB is a fully automated system for collecting and loading in-line manufacturing parameters and sample probe, wafer probe, and package test data from a variety of equipment platforms
Keywords :
computer integrated manufacturing; integrated circuit manufacture; manufacturing data processing; semiconductor device manufacture; IC products; MEDB; Manufacturing and Engineering Data Base; analysis toolset; design organizations; forms-based interface utility; in-line manufacturing parameters; manufacturing data analysis; manufacturing data reduction; manufacturing yields; package test data; process engineering; product engineering; productivity; sample probe; semiconductor manufacturing processes; wafer probe; Computer integrated manufacturing; Data analysis; Data engineering; Design engineering; Manufacturing processes; Performance analysis; Probes; Process design; Productivity; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-0740-2
DOI :
10.1109/ASMC.1992.253828
