Title :
Wafer fab production controls for the 90s
Author :
Clark, Charles D. ; Bunch, Thomas E. ; Dobbins, Martin C.
Author_Institution :
Adv. Micro Devices, Inc., Austin, TX, USA
fDate :
30 Sep-1 Oct 1992
Abstract :
The introduction and implementation of production control systems in wafer fabrication operations are discussed. The introduction of production planning systems and the results from the implementation of control systems placed on work-in-process inventory, equipment status, batch queuing/set-up, and statistical processing are considered
Keywords :
batch processing (industrial); computer aided production planning; production control; semiconductor device manufacture; statistical process control; stock control; batch queuing/set-up; equipment status; production control systems; production planning systems; statistical processing; wafer fabrication operations; work-in-process inventory; Continuous improvement; Control systems; Customer service; Fabrication; Job shop scheduling; Meeting planning; Production control; Production planning; Production systems; Pulp manufacturing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-0740-2
DOI :
10.1109/ASMC.1992.253831
