DocumentCode
3418589
Title
A resonant MEMS magnetometer
Author
King, David
Author_Institution
QinetiQ Ltd., Malvern, UK
fYear
2005
fDate
38467
Abstract
A mechanical magnetometer fabricated using deep dry etched SOI was presented. It utilises the Lorenz force generated by a current passing through a magnetic field to actuate a MEMS structure. Operating at the resonant frequency of the MEMS structure, Q amplification is used to pick off small magnetic fields. In this presentation a novel method of operation was presented which allows the device to be used in compass applications.
Keywords
etching; magnetic fields; magnetometers; micromechanical devices; silicon-on-insulator; Lorenz force; MEMS structure; deep dry etched SOI; magnetic field; mechanical magnetometer; resonant MEMS magnetometer; resonant frequency;
fLanguage
English
Publisher
iet
Conference_Titel
MEMS Sensor Technologies, 2005. The IEE Seminar and Exhibition on
ISSN
0537-9989
Print_ISBN
0-86341-523-7
Type
conf
DOI
10.1049/ic:20050114
Filename
1453364
Link To Document