Title :
A resonant MEMS magnetometer
Author_Institution :
QinetiQ Ltd., Malvern, UK
Abstract :
A mechanical magnetometer fabricated using deep dry etched SOI was presented. It utilises the Lorenz force generated by a current passing through a magnetic field to actuate a MEMS structure. Operating at the resonant frequency of the MEMS structure, Q amplification is used to pick off small magnetic fields. In this presentation a novel method of operation was presented which allows the device to be used in compass applications.
Keywords :
etching; magnetic fields; magnetometers; micromechanical devices; silicon-on-insulator; Lorenz force; MEMS structure; deep dry etched SOI; magnetic field; mechanical magnetometer; resonant MEMS magnetometer; resonant frequency;
Conference_Titel :
MEMS Sensor Technologies, 2005. The IEE Seminar and Exhibition on
Print_ISBN :
0-86341-523-7
DOI :
10.1049/ic:20050114
