Title :
HfC(310) high brightness sources for advanced imaging applications
Author :
Mackie, W.A. ; Lovell, J.M. ; Curtis, T.W. ; Magera, G.G.
Author_Institution :
Appl. Phys. Technol., Inc., McMinnville, OR, USA
Abstract :
We report using a Philips XL40 SEM to demonstrate the performance of HfC(310) emitters operating in extended Schottky mode. Higher brightness and smaller spot sizes were obtained over commercial Schottky emitters operating under identical conditions.
Keywords :
Schottky effect; brightness; electron field emission; hafnium compounds; scanning electron microscopy; HfC; Philips XL40 SEM; Schottky mode; advanced imaging applications; brightness; commercial Schottky emitters; hafnium carbide emitters; Zirconium; Schottky electron source; hafnium carbide;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
DOI :
10.1109/IVNC.2013.6624722
