Title :
Fabrication of titanium oxide field emitter array on glass substrate
Author :
Nakatani, Takeshi ; Abo, Satoshi ; Wakaya, Fujio ; Takai, Mineo
Author_Institution :
Center for Quantum Sci. & Technol. under Extreme Conditions, Osaka Univ., Toyonaka, Japan
Abstract :
A two-dimensional array of a Ti disk on an Au thin film on a glass substrate was fabricated. Patterning of titanium-oxide thin film seems to be effective to release stress and contribute to realization of uniform nanorods over large area.
Keywords :
field emitter arrays; glass; gold; nanorods; thin films; titanium compounds; Au; TiO; field emitter array fabrication; glass substrate; patterning; stress release; thin film; two-dimensional array; uniform nanorods; field emitter array; stress release; titanim oxide;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
DOI :
10.1109/IVNC.2013.6624723
