Application of real-time expert systems in semiconductor manufacturing

Some requirements of a real-time expert system and applications in process control, statistical process control, and scheduling are presented. Combining the expert system capability with object oriented modeling, one can build powerful applications in a relatively short time span, thus cutting down the time taken to implement a process control system. Also, when implemented, an expert-system-based dynamic scheduling system should generate far superior results than when only long-term planning is performed and short-term scheduling is done on an ad hoc basis