• DocumentCode
    3419069
  • Title

    A low-voltage high-pressure field ionizer for portable analytical instruments

  • Author

    Fomani, Arash A. ; Velasquez-Garcia, L.F. ; Akinwande, Akintunde Ibitayo

  • Author_Institution
    Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
  • fYear
    2013
  • fDate
    8-12 July 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Field ionization of helium is demonstrated at voltages as low as 150 V using large arrays of self-aligned gated tips. The operating voltages reported here are more than 3× lower than the best results reported in literature. These substantially reduced operating biases permit stable operation of the device at pressures as high as 1 Torr by avoiding arcing or plasma formation that can permanently damage the device. The fabricated arrays are composed of 320,000 nano-scale tips with radii below 5 nm. Ion current in nano-ampere-range, sufficient for most analytical instruments, can be produced with tip-to-gate biases below 200V. Long term (> 104 s) ionization of helium was accomplished at 1 Torr pressures.
  • Keywords
    field ionisation; portable instruments; fabricated arrays; field ionization; helium; low voltage high pressure field ionizer; plasma formation; portable analytical instruments; self aligned gated tips; stable operation; Fabrication; Helium; Ionization; Logic gates; Silicon; Substrates; Field ionization; gated tip arrays; self-aligned structure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
  • Conference_Location
    Roanoke, VA
  • Type

    conf

  • DOI
    10.1109/IVNC.2013.6624740
  • Filename
    6624740