Title :
A low-voltage high-pressure field ionizer for portable analytical instruments
Author :
Fomani, Arash A. ; Velasquez-Garcia, L.F. ; Akinwande, Akintunde Ibitayo
Author_Institution :
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
Field ionization of helium is demonstrated at voltages as low as 150 V using large arrays of self-aligned gated tips. The operating voltages reported here are more than 3× lower than the best results reported in literature. These substantially reduced operating biases permit stable operation of the device at pressures as high as 1 Torr by avoiding arcing or plasma formation that can permanently damage the device. The fabricated arrays are composed of 320,000 nano-scale tips with radii below 5 nm. Ion current in nano-ampere-range, sufficient for most analytical instruments, can be produced with tip-to-gate biases below 200V. Long term (> 104 s) ionization of helium was accomplished at 1 Torr pressures.
Keywords :
field ionisation; portable instruments; fabricated arrays; field ionization; helium; low voltage high pressure field ionizer; plasma formation; portable analytical instruments; self aligned gated tips; stable operation; Fabrication; Helium; Ionization; Logic gates; Silicon; Substrates; Field ionization; gated tip arrays; self-aligned structure;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
DOI :
10.1109/IVNC.2013.6624740