Title : 
A low-voltage high-pressure field ionizer for portable analytical instruments
         
        
            Author : 
Fomani, Arash A. ; Velasquez-Garcia, L.F. ; Akinwande, Akintunde Ibitayo
         
        
            Author_Institution : 
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
         
        
        
        
        
        
            Abstract : 
Field ionization of helium is demonstrated at voltages as low as 150 V using large arrays of self-aligned gated tips. The operating voltages reported here are more than 3× lower than the best results reported in literature. These substantially reduced operating biases permit stable operation of the device at pressures as high as 1 Torr by avoiding arcing or plasma formation that can permanently damage the device. The fabricated arrays are composed of 320,000 nano-scale tips with radii below 5 nm. Ion current in nano-ampere-range, sufficient for most analytical instruments, can be produced with tip-to-gate biases below 200V. Long term (> 104 s) ionization of helium was accomplished at 1 Torr pressures.
         
        
            Keywords : 
field ionisation; portable instruments; fabricated arrays; field ionization; helium; low voltage high pressure field ionizer; plasma formation; portable analytical instruments; self aligned gated tips; stable operation; Fabrication; Helium; Ionization; Logic gates; Silicon; Substrates; Field ionization; gated tip arrays; self-aligned structure;
         
        
        
        
            Conference_Titel : 
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
         
        
            Conference_Location : 
Roanoke, VA
         
        
        
            DOI : 
10.1109/IVNC.2013.6624740