Title :
Fabrication of surface micromachined polysilicon actuators using dry release process of HF gas-phase etching
Author :
Jong Hyun Lee ; Hoi Hwan Chung ; Seung Youl Kang ; Jong Tae Baek ; Hyung Joun Yoo
Author_Institution :
Semicond. Technol. Div., Electron. & Telecommun. Res. Inst., Taejon, South Korea
Abstract :
The HF GPE (gas-phase etching) process was newly developed for the dry-release of sacrificial oxide in polysilicon surface micromachining. Using anhydrous HF gas and CH/sub 3/OH vapor, we successfully fabricated vibrating micro-gyroscope structures with virtually no process-induced stiction. Compared with conventional wet-release, HF GPE process showed more than eight times longer detachment length, which enables highly sensitive sensors.
Keywords :
electrostatic devices; elemental semiconductors; etching; gyroscopes; microactuators; micromachining; microsensors; semiconductor technology; silicon; CH/sub 3/OH vapor; HF; HF gas-phase etching; Si; anhydrous HF gas; cantilevers; detachment length; electrostatic actuator fabrication; highly sensitive sensors; methanol vapor; polysilicon surface micromachining; process-induced stiction; sacrificial oxide dry release; surface micromachined polysilicon actuators; vibrating micro-gyroscope structures; Actuators; Electrostatics; Fabrication; Hafnium; Methanol; Micromachining; Micromechanical devices; Microstructure; Plasma applications; Wet etching;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.554091
